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Volumn 135, Issue 1-4, 1998, Pages 115-120

Contribution of low-energy ion bombardment to the growth of atomically flat Ag(111) and Au(111) films by glow discharge sputtering

Author keywords

Glow discharge sputtering; Gold; Ion bombardment; Layer by layer growth; Silver

Indexed keywords

FILM GROWTH; GLOW DISCHARGES; GOLD; ION BOMBARDMENT; KINETIC ENERGY; SILVER; SPUTTER DEPOSITION;

GLOW DISCHARGE SPUTTERING; LOW ENERGY ION BOMBARDMENT;

METALLIC FILMS;

EID: 0032475345 PISSN: 01694332 EISSN: None Source Type: Journal
DOI: 10.1016/S0169-4332(98)00270-0 Document Type: Article

Times cited : (29)

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