Deposition of carbon thin films by free electron laser

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 144, Issue 1-4, 1998, Pages 147-151

  Okoshi, Masayuki ^a   Hanabusa, Mitsugu ^a   Okuma, Shinji ^b  

^a TOYOHASHI UNIVERSITY OF TECHNOLOGY   (Japan)

^b TOSHIBA CORPORATION   (Japan)

Author keywords

Ablation; Acetone; Carbon films; Free electron laser; Frozen target; Graphite target

Indexed keywords

ACETONE; DECOMPOSITION; FREE ELECTRON LASERS; FULLERENES; GRAPHITE; INFRARED RADIATION; LASER ABLATION; LIGHT ABSORPTION; PULSED LASER APPLICATIONS; SILICON; SUBSTRATES; THIN FILMS;

PULSED LASER DEPOSITION (PLD);

DEPOSITION;

EID: 0032475295     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-583X(98)00304-8     Document Type: Article

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