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Volumn 126, Issue 3-4, 1998, Pages 303-308

XPS studies of copper deposition from 1,5-cyclooctadiene-copper(I)-hexafluoroacetylacetonate on Si(111)

(4) Cheng, T Q a Griffiths, K a Norton, P R a Puddephatt, R J a

a UNIVERSITY OF WESTERN ONTARIO (Canada)

Author keywords

Chemical vapour deposition; Copper; Copper organometallic precursor; Metal semiconductor interfaces; Metallic films; Photoelectron emission; Silicon; X ray photoelectron spectroscopy

Indexed keywords

CARBIDES; CHEMICAL VAPOR DEPOSITION; COPPER; DECOMPOSITION; DISSOCIATION; INTERFACES (MATERIALS); METALLIC FILMS; PHOTOEMISSION; SILICON; THERMAL EFFECTS; X RAY PHOTOELECTRON SPECTROSCOPY;

COPPER ORGANOMETALLIC PRECURSOR; METAL SEMICONDUCTOR INTERFACE; PHOTOELECTRON EMISSION;

SURFACES;

EID: 0032473781 PISSN: 01694332 EISSN: None Source Type: Journal
DOI: 10.1016/S0169-4332(97)00583-7 Document Type: Article

Times cited : (12)

References (15)

1
- 23544443191
- M.J. Hampden-Smith, T.T. Kodas, MRS Bull. 18 (1993) 46.
- (1993) MRS Bull. , vol.18 , pp. 46
- Hampden-Smith, M.J.¹ Kodas, T.T.²

2
- 84971054660
- R.L. Van Hemert, L.B. Spendlove, R.E. Sievers, J. Electrochem. Soc. 112 (1965) 1123.
- (1965) J. Electrochem. Soc. , vol.112 , pp. 1123
- Van Hemert, R.L.¹ Spendlove, L.B.² Sievers, R.E.³

3
- 0024764747
- D. Temple, A. Reisman, J. Electrochem. Soc. 136 (1989) 3525.
- (1989) J. Electrochem. Soc. , vol.136 , pp. 3525
- Temple, D.¹ Reisman, A.²

4
- 0346591630
- Microelectronic Center of North Carolina
- D. Temple, A. Reisman, Technical Report, Microelectronic Center of North Carolina, No. 4, 1988.
- (1988) Technical Report , vol.4
- Temple, D.¹ Reisman, A.²

5
- 0026822237
- A. Jain, K.M. Chi, M.J. Hampden-Smith, T.T. Kodas, J.D. farr, M.F. Paffett, J. Mater. Res. 7 (1992) 261.
- (1992) J. Mater. Res. , vol.7 , pp. 261
- Jain, A.¹ Chi, K.M.² Hampden-Smith, M.J.³ Kodas, T.T.⁴ Farr, J.D.⁵ Paffett, M.F.⁶

6
- 0027187917
- J. Randall Creighton, J.E. Parmeter, Crit. Rev. Solid State Mater. Sci. 18 (1993) 175.
- (1993) Crit. Rev. Solid State Mater. Sci. , vol.18 , pp. 175
- Randall Creighton, J.¹ Parmeter, J.E.²

7
- 0001342597
- R. Kumar, F.R. Fronczek, A.W. Maverick, W.G. Lai, G.L. Griffin, Chem. Mater. 4 (1989) 577.
- (1989) Chem. Mater. , vol.4 , pp. 577
- Kumar, R.¹ Fronczek, F.R.² Maverick, A.W.³ Lai, W.G.⁴ Griffin, G.L.⁵

8
- 21144475976
- S.L. Cohen, M. Liehr, S. Kasi, J. Vac. Sci. Technol. A 10 (1992) 863.
- (1992) J. Vac. Sci. Technol. A , vol.10 , pp. 863
- Cohen, S.L.¹ Liehr, M.² Kasi, S.³

9
- 0031125922
- J.H. Horton, J.G. Shapter, T.Q. Cheng, W.N. Lennard, P.R. Norton, Surf. Sci. 375 (1997) 171.
- (1997) Surf. Sci. , vol.375 , pp. 171
- Horton, J.H.¹ Shapter, J.G.² Cheng, T.Q.³ Lennard, W.N.⁴ Norton, P.R.⁵

10
- 0028419902
- T.D. Pope, K. Griffiths, P.R. Norton, Surf. Sci. 306 (1994) 294.
- (1994) Surf. Sci. , vol.306 , pp. 294
- Pope, T.D.¹ Griffiths, K.² Norton, P.R.³

11
- 21544482550
- S.K. Reynolds, C.J. Smart, E.F. Baran, T.H. Baum, C.E. Larson, P.J. Brock, Appl. Phys. Lett. 59 (1991) 2332.
- (1991) Appl. Phys. Lett. , vol.59 , pp. 2332
- Reynolds, S.K.¹ Smart, C.J.² Baran, E.F.³ Baum, T.H.⁴ Larson, C.E.⁵ Brock, P.J.⁶

12
- 0347221553
- Ph.D. Thesis, The University of Western Ontario, London, Canada
- E.C. Ou, Ph.D. Thesis, The University of Western Ontario, London, Canada, 1992.
- (1992)
- Ou, E.C.¹

13
- 84947832683
- D.C. Frost, A. Ishitani, C.A. McDowell, Mol. Phys. 24 (1972) 861.
- (1972) Mol. Phys. , vol.24 , pp. 861
- Frost, D.C.¹ Ishitani, A.² McDowell, C.A.³

14
- 0347851638
- S.L. Cohen, M. Liehr, S. Kasi, Appl. Phys. 1 (60) (1991) 50.
- (1991) Appl. Phys. , vol.1 , Issue.60 , pp. 50
- Cohen, S.L.¹ Liehr, M.² Kasi, S.³

15
- 0003459529
- Perkin Elmer, Eden Prairie
- J.F. Moulder, W.F. Stickle, P.E. Stobol, K.D. Bomben, Handbook of X-ray Photoelectron Spectroscopy, Perkin Elmer, Eden Prairie, 1992.
- (1992) Handbook of X-ray Photoelectron Spectroscopy
- Moulder, J.F.¹ Stickle, W.F.² Stobol, P.E.³ Bomben, K.D.⁴

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