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Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 135, Issue 1-4, 1998, Pages 471-476

Emission of ground and metastable state Ni and Co atoms during ion-beam sputtering: Quantitative measurements of population and kinetic energy distributions

(4) Lievens, Peter a Philipsen, Vicky a Vandeweert, Erno a Silverans, Roger E a

a UNIVERSITY OF LEUVEN (Belgium)

Author keywords

Atomic excited states population; Ion beam sputtering; Resonance ionization spectroscopy

Indexed keywords

CHARGE TRANSFER; COBALT; ELECTRONIC STRUCTURE; ION BEAMS; IONIZATION; NICKEL; POLYCRYSTALLINE MATERIALS; SPECTROSCOPIC ANALYSIS;

ION BEAM SPUTTERING; RESONANCE IONIZATION SPECTROSCOPY;

ATOMIC PHYSICS;

EID: 0032472705 PISSN: 0168583X EISSN: None Source Type: Journal
DOI: 10.1016/S0168-583X(97)00521-1 Document Type: Article

Times cited : (19)

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