Angular distributions of particles sputtered from polycrystalline platinum

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 135, Issue 1-4, 1998, Pages 285-288

  Chernysh, V S ^a   Eckstein, W ^b   Haidarov, A A ^a   Kulikauskas, V S ^a   Kurnaev, V A ^c   Mashkova, E S ^a   Molchanov, V A ^a  

^a MOSCOW STATE UNIVERSITY   (Russian Federation)

^b MAX PLANCK INSTITUT FÜR PLASMAPHYSIK   (Germany)

^c NATIONAL RESEARCH NUCLEAR UNIVERSITY MEPHI   (Russian Federation)

Author keywords

[No Author keywords available]

Indexed keywords

ARGON; BINDING ENERGY; COMPUTER SIMULATION; PLATINUM; POLYCRYSTALLINE MATERIALS; ROLLING; SHEET METAL; SPUTTER DEPOSITION;

ANGULAR DISTRIBUTIONS; WEHNER SPOT;

ION BOMBARDMENT;

EID: 0032472632     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-583X(97)00604-6     Document Type: Article

References (11)

1. R. Behrisch, (Ed.), Sputtering by Particle Bombardment, vol. I, Springer, Berlin, 1981.
2. R. Behrisch, K. Wittmaack (Eds.), Sputtering by Particle Bombardment, vol. III, Springer, Berlin, 1991.
3. E.S. Mashkova, V.A. Molchanov, Phys. Chem. Mech. Surfaces 11 (1995) 243.
4. P. Lecoeur, B. Mercey, H. Murray, J. Vac. Sci. Technol. A 13 (4) (1995) 2221.
5. J. Im, A.R. Krauss, Y. Lin, J.A. Shultz, O. Auciello, D.M. Gruen, R.P.H. Chang, Nucl. Instr. and Meth. B 118 (1996) 772.
6. H.E. Roosendaal, J.B. Sanders, U. Littmark, Phys. Rev. B 26 (1982) 5261.
7. M.W. Sckerl, P. Sigmund, M. Vicanek, Mat. Fys. Medd. Dan. Vid. Selsk. 44 (3) (1996) 1.
8. T. Nagatomi, K. Min, R. Shimizu, Jpn. J. Appl. Phys. 33 (1994) 6675.
9. H.H. Andersen, B. Stenum, T. Sorensen, H.J. Whitlow, Nucl. Instr. and Meth. B 6 (1985) 459.
10. V.S. Chernysh, Dissertation, Moscow, 1989.
11. W. Eckstein, Computer Simulation of Ion-Solid Interactions, Springer, Berlin, 1991.