Adhesion modification in (Cu, Nb, Ti)/SiO2 pairs by argon ion bombardment

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 135, Issue 1-4, 1998, Pages 545-549

  Cheng, Guoan ^a   Xu, Songlan ^a   Ye, Dongru ^a  

^a NANCHANG UNIVERSITY   (China)

Author keywords

Adhesion modification; Interface; Ion bombardment; Metal oxide pairs

Indexed keywords

ADHESION; ARGON; COPPER; INTERFACES (MATERIALS); ION BEAMS; METALLIC FILMS; NIOBIUM; NUCLEAR ENERGY; SILICA; TITANIUM;

ADHESION MODIFICATION; NUCLEAR ENERGY LOSS;

ION BOMBARDMENT;

EID: 0032472630     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-583X(97)00627-7     Document Type: Article

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