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Volumn 3331, Issue , 1998, Pages 342-348
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Synchrotron radiation process and in-situ observation technique: Infrared reflection absorption spectroscopy
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Author keywords
Core electron excitation process; Etching; Infrared reflection absorption spectroscopy; Nanometric process; Synchrotron radiation processing
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Indexed keywords
ABSORPTION SPECTROSCOPY;
DECOMPOSITION;
ETCHING;
INFRARED RADIATION;
OPTICAL RESOLVING POWER;
QUENCHING;
SILANES;
INFRARED REFLECTION ABSORPTION SPECTROSCOPY;
SYNCHROTRON RADIATION;
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EID: 0032403819
PISSN: 0277786X
EISSN: None
Source Type: Conference Proceeding
DOI: 10.1117/12.309588 Document Type: Conference Paper |
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Times cited : (2)
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References (5)
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