Rapid yield learning through optical defect and electrical test analysis

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3332, Issue , 1998, Pages 232-242

  Gleason, Shaun S ^a   Tobin, Kenneth W ^a   Karnowski, Thomas P ^a   Lakhani, Fred ^a  

^a OAK RIDGE NATIONAL LABORATORY   (United States)

Author keywords

Electrical test; Moments; Semiconductor inspection; Spatial pattern recognition

Indexed keywords

APPLICATION SPECIFIC INTEGRATED CIRCUITS; DYNAMIC RANDOM ACCESS STORAGE; FUZZY SETS; IMAGE PROCESSING; PATTERN RECOGNITION; STATIC RANDOM ACCESS STORAGE;

ELECTRICAL TEST ANALYSIS;

SEMICONDUCTOR DEVICE MANUFACTURE;

EID: 0032403599     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.308731     Document Type: Conference Paper

References (10)

1. An image paradigm for semiconductor defect data reduction
2. Directional-based dilation for connection of piece-wise objects: A semiconductor manufacturing case study
3. A fuzzy K-nearest neighbor algorithm
4. Feature analysis and classification of manufacturing signatures on semiconductor wafers
5. Automatic classification of spatial signatures on semiconductor wafermaps