Characteristics of heater film for inkjet printhead

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3422, Issue , 1998, Pages 61-68

  Chiu, Sao Ling ^a   Wuu, Dong Sing ^a   Wu, Yi Yung ^a  

^a INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE   (Taiwan)

Author keywords

Heater film; Inkjet; Printhead; Ta Al; Thermal

Indexed keywords

COMPOSITION; ELECTRIC RESISTANCE; FABRICATION; HIGH TEMPERATURE OPERATIONS; RESISTORS; STRESS ANALYSIS; TANTALUM COMPOUNDS; THIN FILMS;

HEATER FILMS; INKJET PRINTHEADS;

PRINTING;

ASSEMBLY; CHEMICAL COMPOSITION; ELECTRIC RESISTANCE; HIGH TEMPERATURE TESTS; STRESS ANALYSIS; TANTALUM COMPOUNDS; THIN FILMS;

EID: 0032401366     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.311104     Document Type: Conference Paper

References (7)

1. Tantalum and tantalum alloy thin film circuits
2. High stability cosputtered Ta-50 At. % Al alloy film resistor
3. Electrical and structural properties of co-sputtered tantalum - Aluminum films
4. Compositional control of tantalum - Aluminum alloy Films by a dc Biased, ac sputtering technique
5. Cosputtered aluminumrich AlTa alloy films
6. Measuring thin film stress in metallizations and passivations
7. Compressive stress increase with repeated thermal cycling in tantalum (Oxygen) thin films