Conductive circuit formation on organosilicon films by patterning with UV

Chemistry Letters

Volumn , Issue 4, 1998, Pages 347-348

  Fukushima, Motoo ^a   Hamada, Yoshitaka ^a   Tabei, Eiichi ^a   Aramata, Mikio ^a   Mori, Shigeru ^a   Yamamoto, Yasushi ^a  

^a SHIN ETSU CHEMICAL CO LTD   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0032400108     PISSN: 03667022     EISSN: None     Source Type: Journal    
DOI: 10.1246/cl.1998.347     Document Type: Article

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