Modeling of certain nonuniform processes in semiconductor technology

Technical Physics

Volumn 43, Issue 4, 1998, Pages 416-422

  Zon, B A ^a   Ledovskii S B ^a   Likholet, A N ^a  

^a VORONEZH STATE UNIVERSITY   (Russian Federation)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0032400034     PISSN: 10637842     EISSN: None     Source Type: Journal    
DOI: 10.1134/1.1258997     Document Type: Article

References (15)

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