Limitations on threshold adjustment by backgating in fully depleted silicon-on-insulator metal-oxide-semiconductor field effect transistors

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 16, Issue 2, 1998, Pages 838-842

  Tarr, N G ^a   Wang, Y ^a   Soreefan, R ^a   Snelgrove, W M ^a   Manning, B M ^a   Bazarjani, S ^a   MacElwee, T W ^b  

^a CARLETON UNIVERSITY   (Canada)

^b NORTEL NETWORKS   (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0032395993     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.581069     Document Type: Article

References (12)

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