High-pressure magnetron sputtering: Gas-phase processes

Technical Physics

Volumn 43, Issue 7, 1998, Pages 766-773

  Znamenskii A G ^a   Marchenko, V A ^a  

^a INSTITUTE OF MICROELECTRONICS TECHNOLOGY AND HIGH PURITY MATERIALS   (Russian Federation)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0032394161     PISSN: 10637842     EISSN: None     Source Type: Journal    
DOI: 10.1134/1.1259071     Document Type: Article

References (23)

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