-
2
-
-
0004255148
-
-
Academic Press, Boston, MA
-
D.M. Manos, D.L. Flamm, Plasma Etching: An Introduction, Academic Press, Boston, MA, 1989.
-
(1989)
Plasma Etching: An Introduction
-
-
Manos, D.M.1
Flamm, D.L.2
-
3
-
-
84957149268
-
-
Karlsson L., Mattson L., Jadrny R., Bergmark T., Siegbahn K. Phys. Scr. 14:1976;230.
-
(1976)
Phys. Scr.
, vol.14
, pp. 230
-
-
Karlsson, L.1
Mattson, L.2
Jadrny, R.3
Bergmark, T.4
Siegbahn, K.5
-
4
-
-
0000440541
-
-
Addison-Jones B.M., Tan K.H., Yates B.W., Cutler J.N., Bancroft G.M., Tse J.S. J. Electron Spectrosc. Relat. Phenom. 48:1989;155.
-
(1989)
J. Electron Spectrosc. Relat. Phenom.
, vol.48
, pp. 155
-
-
Addison-Jones, B.M.1
Tan, K.H.2
Yates, B.W.3
Cutler, J.N.4
Bancroft, G.M.5
Tse, J.S.6
-
5
-
-
21144470761
-
-
Creasey J.C., Jones H.M., Smith D.M., Tuckett R.P., Hatherly P.A., Codling K., Powis I. Chem. Phys. 174:1993;441.
-
(1993)
Chem. Phys.
, vol.174
, pp. 441
-
-
Creasey, J.C.1
Jones, H.M.2
Smith, D.M.3
Tuckett, R.P.4
Hatherly, P.A.5
Codling, K.6
Powis, I.7
-
6
-
-
21844491023
-
-
Holland D.M.P., MacDonald M.A., Baltzer P., Karlsson L., Lundqvist M., Wannberg B., von Niessen W. Chem. Phys. 192:1995;333.
-
(1995)
Chem. Phys.
, vol.192
, pp. 333
-
-
Holland, D.M.P.1
MacDonald, M.A.2
Baltzer, P.3
Karlsson, L.4
Lundqvist, M.5
Wannberg, B.6
Von Niessen, W.7
-
9
-
-
0029370522
-
-
Cheung Y.-S., Chen Y.-J., Ng C.Y., Chiu S.-W., Li W.-K. J. Am. Chem. Soc. 117:1995;9725.
-
(1995)
J. Am. Chem. Soc.
, vol.117
, pp. 9725
-
-
Cheung, Y.-S.1
Chen, Y.-J.2
Ng, C.Y.3
Chiu, S.-W.4
Li, W.-K.5
-
11
-
-
0001795323
-
-
Al-Nasir A.H., Chaudhry M.A., Duncan A.J., Hippler R., Campbell D.M., Kleinpoppen H. J. Phys. B. 29:1996;1849.
-
(1996)
J. Phys. B
, vol.29
, pp. 1849
-
-
Al-Nasir, A.H.1
Chaudhry, M.A.2
Duncan, A.J.3
Hippler, R.4
Campbell, D.M.5
Kleinpoppen, H.6
-
12
-
-
0001022040
-
-
Sato Y., Ueda K., Chiba H., Shigemasa E., Yagishita A. Chem. Phys. Lett. 196:1991;475.
-
(1991)
Chem. Phys. Lett.
, vol.196
, pp. 475
-
-
Sato, Y.1
Ueda, K.2
Chiba, H.3
Shigemasa, E.4
Yagishita, A.5
-
15
-
-
0000178818
-
-
Frasinski L.J., Stankiewicz M., Randall K.J., Hatherly P.A., Codling K. J. Phys. B. 19:1986;L819.
-
(1986)
J. Phys. B
, vol.19
, pp. 819
-
-
Frasinski, L.J.1
Stankiewicz, M.2
Randall, K.J.3
Hatherly, P.A.4
Codling, K.5
-
17
-
-
0002147516
-
-
Simon M., Morin P., Lablanquie P., Lavollée M., Ueda K., Kosugi N. Chem. Phys. Lett. 238:1995;42.
-
(1995)
Chem. Phys. Lett.
, vol.238
, pp. 42
-
-
Simon, M.1
Morin, P.2
Lablanquie, P.3
Lavollée, M.4
Ueda, K.5
Kosugi, N.6
-
18
-
-
0039928639
-
-
Codling K., Frasinski L.J., Hatherly P.A., Stankiewicz M., Larkins F.P. J. Phys. B. 24:1991;509.
-
(1991)
J. Phys. B
, vol.24
, pp. 509
-
-
Codling, K.1
Frasinski, L.J.2
Hatherly, P.A.3
Stankiewicz, M.4
Larkins, F.P.5
-
22
-
-
0001044631
-
-
Ben-Itzhak I., Carnes K.D., Ginther S.G., Johnson D.T., Norris P.J., Weaver O.L. Phys. Rev. A. 47:1993;3748.
-
(1993)
Phys. Rev. a
, vol.47
, pp. 3748
-
-
Ben-Itzhak, I.1
Carnes, K.D.2
Ginther, S.G.3
Johnson, D.T.4
Norris, P.J.5
Weaver, O.L.6
-
24
-
-
36549094376
-
-
Gao R.S., Gibner P.S., Newman J.H., Smith K.A., Stebbings R.F. Rev. Sci. Instrum. 55:1984;1756.
-
(1984)
Rev. Sci. Instrum.
, vol.55
, pp. 1756
-
-
Gao, R.S.1
Gibner, P.S.2
Newman, J.H.3
Smith, K.A.4
Stebbings, R.F.5
-
25
-
-
85033901927
-
-
Doctor, Thesis, Univ. of Giessen, Giessen
-
U. Staude, Doctor, Thesis, Univ. of Giessen, Giessen 1994.
-
(1994)
-
-
Staude, U.1
-
29
-
-
0039928638
-
-
Doctor, Thesis, Univ. of Freiburg, Freiburg
-
W. Haas, Doctor, Thesis, Univ. of Freiburg, Freiburg, 1993.
-
(1993)
-
-
Haas, W.1
-
30
-
-
36449000775
-
-
Thiessen R., Delwiche J., Robbe J.M., Duflot D., Flament J.P., Eland J.H.D. J. Chem. Phys. 99:1993;6590.
-
(1993)
J. Chem. Phys.
, vol.99
, pp. 6590
-
-
Thiessen, R.1
Delwiche, J.2
Robbe, J.M.3
Duflot, D.4
Flament, J.P.5
Eland, J.H.D.6
-
32
-
-
0001817063
-
-
Sampoll G., Watson R.L., Heber O., Horvat V., Wohrer K., Chabot M. Phys. Rev. A. 45:1992;2903.
-
(1992)
Phys. Rev. a
, vol.45
, pp. 2903
-
-
Sampoll, G.1
Watson, R.L.2
Heber, O.3
Horvat, V.4
Wohrer, K.5
Chabot, M.6
-
33
-
-
0041115591
-
-
Diploma Thesis, Univ. of Freiburg, Freiburg
-
S. Eckstein, Diploma Thesis, Univ. of Freiburg, Freiburg, 1995.
-
(1995)
-
-
Eckstein, S.1
-
35
-
-
0001524254
-
-
Rudd M.E., DuBois R.D., Toburen L.H., Ratcliffe C.A., Goffe T.V. Phys. Rev. A. 28:1984;3244.
-
(1984)
Phys. Rev. a
, vol.28
, pp. 3244
-
-
Rudd, M.E.1
Dubois, R.D.2
Toburen, L.H.3
Ratcliffe, C.A.4
Goffe, T.V.5
-
37
-
-
4243539377
-
-
Ahlrichs R., Bär M., Häser M., Horn H., Kölmel C. Chem. Phys. Lett. 162:1989;165.
-
(1989)
Chem. Phys. Lett.
, vol.162
, pp. 165
-
-
Ahlrichs, R.1
Bär, M.2
Häser, M.3
Horn, H.4
Kölmel, C.5
-
43
-
-
0005336857
-
-
Gibler D.D., Adams C.J., Fischer M., Zalkin A., Bartlett N. Inorg. Chem. 11:1972;2325.
-
(1972)
Inorg. Chem.
, vol.11
, pp. 2325
-
-
Gibler, D.D.1
Adams, C.J.2
Fischer, M.3
Zalkin, A.4
Bartlett, N.5
-
44
-
-
33845471321
-
-
Mallouk T.E., Rosenthal G.L., Müller G., Brusasco R., Bartlett N. Inorg. Chem. 23:1984;3167.
-
(1984)
Inorg. Chem.
, vol.23
, pp. 3167
-
-
Mallouk, T.E.1
Rosenthal, G.L.2
Müller, G.3
Brusasco, R.4
Bartlett, N.5
-
48
-
-
36549094943
-
-
Pople J.A., Head-Gordon M., Fox D.J., Raghavachari K., Curtiss L.A. J. Chem. Phys. 90:1989;5622.
-
(1989)
J. Chem. Phys.
, vol.90
, pp. 5622
-
-
Pople, J.A.1
Head-Gordon, M.2
Fox, D.J.3
Raghavachari, K.4
Curtiss, L.A.5
-
51
-
-
0003568278
-
-
in: H.F. Schaefer III (Ed.), Plenum, New York
-
W. Meyer, in: H.F. Schaefer III (Ed.), Modern Theoretical Chemistry, Plenum, New York, 1977.
-
(1977)
Modern Theoretical Chemistry
-
-
Meyer, W.1
-
52
-
-
0031569167
-
-
Yencha A.J., Thompson D.B., Cormack A.J., Cooper D.R., Zubek M., Bolognesi P., King G.C. Chem. Phys. 216:1997;227.
-
(1997)
Chem. Phys.
, vol.216
, pp. 227
-
-
Yencha, A.J.1
Thompson, D.B.2
Cormack, A.J.3
Cooper, D.R.4
Zubek, M.5
Bolognesi, P.6
King, G.C.7
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