A cylindrical magnetron sputtering system for depositing metal-aluminium nitride cermet solar coatings onto batches of tubes

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 16, Issue 2, 1998, Pages 628-632

  Zhang, Qi Chu ^a   Zhao, K ^b   Zhang, B C ^b   Wang, L F ^b   Shen, Z L ^b   Lu, D Q ^b   Xie, D L ^b   Zhou, Z J ^b   Li, B F ^c  

^a UNIVERSITY OF SYDNEY   (Australia)

^b PEKING UNIVERSITY   (China)

^c Beijing TurboCMS Co Ltd   (China)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0032386482     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.581079     Document Type: Article

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