Infrared spectroscopy of a silicon surface bombarded by nitrogen ions

Technical Physics Letters

Volumn 24, Issue 3, 1998, Pages 214-216

  Bachurin, V I ^a   Lepshin, P A ^a   Smirnov, V K ^a   Churilov, A B ^a  

^a RUSSIAN ACADEMY OF SCIENCES   (Russian Federation)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0032384997     PISSN: 10637850     EISSN: None     Source Type: Journal    
DOI: 10.1134/1.1262058     Document Type: Article

References (12)

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