Determination of trace amounts of phosphorus in high-purity silicon by ICP-MS after acid-vapor decomposition under elevated pressure and isolation as a molybdophosphate-dodecyltrimethylammonium bromide ion pair

Bunseki Kagaku

Volumn 47, Issue 3, 1998, Pages 187-193

  Fujimoto, Kyoko ^b   Ito, Masao ^b   Shimura, Makoto ^b   Yoshioka, Keiichi ^a  

^a JFE STEEL CORPORATION   (Japan)

^b NONE

Author keywords

Collection as molybdophosphate on an filter; Indirect determination of phosphorus; Isotopic dilution ICP MS; Pressured acid vapor decomposition; Trace amounts of phosphorus in silicon

Indexed keywords

EID: 0032383538     PISSN: 05251931     EISSN: None     Source Type: Journal    
DOI: 10.2116/bunsekikagaku.47.187     Document Type: Article

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