Design of beamline optics for EUVL

Journal of Synchrotron Radiation

Volumn 5, Issue 3, 1998, Pages 1149-1152

  Watanabe, Takeo ^a   Haga, Tsuneyuki ^b   Niibe, Masahito ^a   Kinoshita, Hiroo ^a  

^a UNIVERSITY OF HYOGO   (Japan)

^b NTT CORPORATION   (Japan)

Author keywords

Beamline design; Collimating optics; Extreme ultraviolet lithography (EUVL); Toroidal mirrors

Indexed keywords

EID: 0032381611     PISSN: 09090495     EISSN: None     Source Type: Journal    
DOI: 10.1107/S0909049597017536     Document Type: Article

References (11)

1. Cook, L. G. (1981). US Patent 4 265 510.
2. Haga, T. & Kinoshita, H. (1995). J. Vac. Sci. Technol. B, 13(6), 2914-2918.
3. Jewell, T.E., Rodgers, J. M. & Thompson, K. P. (1990). J. Vac. Sci. Technol. B, 8, 1519-1523.
4. Kinoshita, H., Kurihara, K., Ishii, Y. & Torii, Y. (1989). J. Vac. Sci. Technol. B, 7, 1648-1651.
5. Kinoshita, H., Kurihara, K., Mizota, T., Haga, T., Takenaka, H. & Torii, Y. (1993). Appl. Opt. 32, 7079-7083.
6. Kinoshita, H., Watanabe, T., Koike, M. & Namioka, T. (1997). Proc. SPIE, 3152, 211-220.
7. Kurihara, K., Kinoshita, H., Takeuchi, R. Mizota, T., Haga, T. & Torii, Y. (1991). J. Vac. Sci. Technol. B, 9, 3189-3192.
8. Lai, B., Chapman, K. & Cerrina, F. (1988). Nucl. Instrum. Methods A, 266, 544-549.
9. Mashima, K. (1997). JSPE Proceedings of the Second US-Japan Workshop on Soft X-ray Optics, pp. 306-315. Tokyo: The Japan Society for Precision Engineering.
10. Namioka, T., Koike, M., Kinoshita, H. & Haga, T. (1995). Proc. SPIE, 2576, 94-104.
11. Watanabe, T., Kinoshita, H. & Niibe, M. (1997). JSPE Proceedings of the Second US-Japan Workshop on Soft X-ray Optics, pp. 341-348. Tokyo: The Japan Society for Precision Engineering.