Influence of fabrication errors on wölter mirror imaging performance

Applied Optics

Volumn 37, Issue 34, 1998, Pages 8057-8066

  Sugisaki, Katsumi ^a   Takahashi, Shin Ich ^a   Yoshidomi, Yasuji ^a   Shinada, Kuninori ^a   Mitomi, Osamu ^a   Uchishiba, Eishiro ^a   Hamada, Ryuji ^a   Kato, Tokio ^a   Aoki, Sadao ^b  

^a NIKON CORPORATION   (Japan)

^b UNIVERSITY OF TSUKUBA   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTROMAGNETIC WAVE DIFFRACTION; ERROR ANALYSIS; ERRORS; FABRICATION; FITS AND TOLERANCES; IMAGING TECHNIQUES; LIGHT SCATTERING; OPTICAL RESOLVING POWER; PERFORMANCE; RAY TRACING; SURFACE ROUGHNESS; X RAY MICROSCOPES;

DIFFRACTION THEORY; FABRICATION ERRORS; SOFT X RAY MICROSCOPES; WOLTER MIRROR;

MIRRORS;

EID: 0032376268     PISSN: 1559128X     EISSN: 21553165     Source Type: Journal    
DOI: 10.1364/AO.37.008057     Document Type: Article

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