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Volumn 14, Issue 2, 1998, Pages 281-286

Quantification Method Using the Inverse Velocity Dependence of Ion Intensities in Secondary Ion Mass Spectrometry: The High-Energy Method

(2) Higashi, Yasuhiro a Homma, Yoshikazu a

a NTT CORPORATION (Japan)

Author keywords

Dopant; Kinetic energy; Quantification method; Secondary ion mass spectrometry; Velocity

Indexed keywords

DOPING (ADDITIVES); IONS; KINETIC ENERGY; KINETICS; SECONDARY EMISSION; SECONDARY ION MASS SPECTROMETRY; VELOCITY;

EXPONENTIAL DEPENDENCE; INVERSE VELOCITIES; ION INTENSITIES; PARTS PER MILLIONS; QUANTIFICATION METHODS; SECONDARY ION EMISSION; SECONDARY IONS; VELOCITY DEPENDENCE;

INVERSE PROBLEMS;

EID: 0032374422 PISSN: 09106340 EISSN: None Source Type: Journal
DOI: 10.2116/analsci.14.281 Document Type: Article

Times cited : (3)

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