Etching of diamond (100) surface by atomic hydrogen: Real-time observation by reflection high energy electron diffraction

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 16, Issue 2, 1998, Pages 749-753

  Komatsu, Shojiro ^a   Okada, Katsuyuki ^a   Chou, Sung Baek ^a   Aizawa, Takashi ^a   Shigetani, Hisashi ^b   Tanaka, Junzo ^a   Sato, Yoichiro ^a  

^a NATIONAL INSTITUTE FOR MATERIALS SCIENCE   (Japan)

^b TAIYO YUDEN CO LTD   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0032367283     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.581479     Document Type: Article

References (13)

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