Phase effects owing to multilayer coatings in a two-mirror extreme-ultraviolet schwarzschild objective

Applied Optics

Volumn 37, Issue 34, 1998, Pages 8021-8029

  Tejnil, Edita ^a,b,c   Goldberg, Kenneth A ^a,d   Bokor, Jeffrey ^a,b  

^a LAWRENCE BERKELEY NATIONAL LABORATORY   (United States)

^b UNIVERSITY OF CALIFORNIA   (United States)

^c INTEL CORPORATION   (United States)

^d UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ABERRATIONS; IMAGE QUALITY; INTERFEROMETERS; LIGHT REFLECTION; MIRRORS; MOLYBDENUM; OPTICAL MULTILAYERS; OPTICAL SYSTEMS; REFLECTIVE COATINGS; REFRACTIVE INDEX; SILICON; ULTRAVIOLET RADIATION;

CHROMATIC VIGNETTING; EXTREME ULTRAVIOLET; MOLYBDENUM SILICON MULTILAYER COATINGS; MULTILAYER COATED REFLECTIVE SCHWARZSCHILD OBJECTIVE; PHASE SHIFTING POINT DIFFRACTION INTERFEROMETER;

FIBER OPTICS;

EID: 0032362673     PISSN: 1559128X     EISSN: 21553165     Source Type: Journal    
DOI: 10.1364/AO.37.008021     Document Type: Article

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