Thickness distribution in pulsed laser deposited PZT films

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 16, Issue 4, 1998, Pages 2381-2384

  Tyunina, M ^a,b   Wittborn, J ^a   Bjormander C ^a   Rao, K V ^a  

^a ROYAL INSTITUTE OF TECHNOLOGY   (Sweden)

^b UNIVERSITY OF LATVIA   (Latvia)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0032355955     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.581356     Document Type: Article

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