Surface temperature effects on the energy distribution in liquid metal ion sources

Journal of the Korean Physical Society

Volumn 33, Issue 5, 1998, Pages 598-606

  Kim, Young Guon ^a   Kim, Young Sam ^a   Choi, Eun Ha ^a   Kang, Seung Oun ^a   Cho, Guangsup ^a   Uhm, Han S ^b  

^a Kwangwoon University   (South Korea)

^b Ajou University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0032353295     PISSN: 03744884     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (11)

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6. L. W. Swanson, G. A. Schwind and A. E. Bell, J. Appl. Phys. 51, 3453 (1980).
7. L. W. Swanson, G. A. Schwind, A. E. Bell and J. E. Brady, J. Vac. Sci. Technol. 16, 1864 (1979).
8. G. L. R. Mair, J. Phys. D20, 1657 (1987).
9. L. W. Swanson, Nucl. Instr. Meth. 218, 347 (1983).
10. D. R. Kingham and L. W. Swanson, Appl. Phys. A41, 157 (1986).
11. P. D. Rrewett, D. J. McMillan, D. K. Jefferies and G. L. R. Mair, Proc. SPIE: Electron Beam, X-ray and Ion Beam Techniquies for Submicron Lithographies II, edited by P. D. Biais 393, 120 (1983).