Stability of Mo/Si multilayer structure used in Bragg-Fresnel optics

Chinese Physics Letters

Volumn 15, Issue 7, 1998, Pages 522-524

  Le, Zi Chun ^a,b   Cao, Jian Lin ^a   Liang, Jing Qiu ^a   Pei, Shu ^a   Yao, Jin Song ^a   Cui, Cheng Jia ^a   Li, Xmg Lin ^c  

^a CHANGCHUN INSTITUTE OF OPTICS   (China)

^b JILIN UNIVERSITY   (China)

^c CHANGCHUN INSTITUTE OF APPLIED CHEMISTRY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

MULTILAYERS; SODIUM HYDROXIDE; X RAY DIFFRACTION; X RAY PHOTOELECTRON SPECTROSCOPY;

BRAGG FRESNEL OPTICS; MO/SI MULTILAYER; MULTILAYER STRUCTURES; NAOH SOLUTIONS; PATTERN GENERATION; SMALL ANGLE X-RAY DIFFRACTIONS; SMALL-ANGLE X-RAY DIFFRACTION; TECHNOLOGICAL PARAMETERS; THERMAL AND CHEMICAL STABILITIES; X-RAY DIFFRACTION TECHNIQUES;

ACETONE;

EID: 0032352325     PISSN: 0256307X     EISSN: None     Source Type: Journal    
DOI: 10.1088/0256-307X/15/7/019     Document Type: Article

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