Stable anionic sites on hydrogenated (111) surfaces of cubic boron nitride resulting from hydrogen atom removal under chemical vapor deposition conditions

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 16, Issue 6, 1998, Pages 3438-3442

  Komatsu, Shojiro ^a   Okada, Katsuyuki ^a   Moriyoshi, Yusuke ^b  

^a NATIONAL INSTITUTE FOR MATERIALS SCIENCE   (Japan)

^b HOSEI UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0032350558     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.581499     Document Type: Article

References (30)

1. O. Mishima, in Introduction to CVD Diamond, Diamond-like Carbon, and Cubic Boron Nitride Technologies, edited by Y. Tzeng, A. Grill, and O. Mishima (Kluwer Academic, Norwell, MA, to be published).
2. J. H. Edgar, J. Mater. Res. 7, 235 (1992).
3. G. A. Slack, J. Phys. Chem. Solids 34, 321 (1973).
4. R. H. Wentorf, Jr., J. Chem. Phys. 36, 1990 (1962).
5. O. Mishima, J. Tanaka, S. Yamaoka, and O. Fukunaga, Science 238, 181 (1987).
6. Synthetic Diamond: Emerging CVD Science and Technology, edited by K. E. Spear and J. P. Dismukes (Wiley, New York, 1994).
7. S. Koizumi, T. Murakami, and T. Inuzuka, Appl. Phys. Lett. 57, 563 (1990).
8. M. Yoshikawa, H. Ishida, A. Ishitani, T. Murakami, S. Koizumi, and T. Inuzuka, Appl. Phys. Lett. 57, 428 (1990).
9. M. Yoshikawa, H. Ishida, A. Ishitani, S. Koizumi, and T. Inuzuka, Appl. Phys. Lett. 58, 1387 (1991).
10. S. Koizumi and T. Inuzuka, Jpn. J. Appl. Phys., Part 1 32, 3920 (1993).
11. L. Wang, P. Pirouz, A. Argoitia, J. S. Ma, and J. C. Angus, Appl. Phys. Lett. 63, 1336 (1993).
12. T. Tomikawa and S. Shikata, Jpn. J. Appl. Phys., Part 1 32, 3938 (1993).
13. W. P. Chai, Y. S. Gu, M. Li, Z. H. Mai, Q. Z. Li, L. Yuan, and S. Pang, Appl. Phys. Lett. 64, 1941 (1994).
14. S. Komatsu, J. Appl. Phys. 80, 3319 (1996).
15. M. J. S. Dewar, E. G. Zoebisch, E. F. Healy, and J. J. P. Stewart, J. Am. Chem. Soc. 107, 3902 (1985); J. J. P. Stewart, J. Comput. Chem. 10, 209 (1989); J. Yu and M. J. Hehre (unpublished).
16. M. J. S. Dewar, E. G. Zoebisch, E. F. Healy, and J. J. P. Stewart, J. Am. Chem. Soc. 107, 3902 (1985); J. J. P. Stewart, J. Comput. Chem. 10, 209 (1989); J. Yu and M. J. Hehre (unpublished).
17. M. J. S. Dewar, E. G. Zoebisch, E. F. Healy, and J. J. P. Stewart, J. Am. Chem. Soc. 107, 3902 (1985); J. J. P. Stewart, J. Comput. Chem. 10, 209 (1989); J. Yu and M. J. Hehre (unpublished).
18. W. J. Hehre, L. Radom, P. v. R. Schleyer, and J. A. Pople, Ab Initio Molecular Orbital Theory (Wiley Interscience, New York, 1986).
19. S. Komatsus, W. Yarbrough, and Y. Moriyoshi, J. Appl. Phys. 81, 7798 (1997).
20. Gaussian'92, revision G.1, M. J. Frisch, G. W. Trucks, M. Head-Gordon, P. M. W. Gill, M. W. Wong, J. B. Foresman, B. G. Johnson, H. B. Schlegel, M. A. Robb, E. S. Replogle, R. Gomperts, J. L. Andres, K. Raghavachari, J. S. Binkley, C. Gonzalez, R. L. Martin, D. J. Fox, D. J. Defrees, J. Baker, J. J. P. Stewart, and J. A. Pople, Gaussian, Inc., Pittsburgh, PA, 1992.
21. Wavefunction Inc., Irvine, CA, 1993.
22. R. M. Chrenko, Solid State Commun. 14, 511 (1974).
23. N. Miyata, K. Moriki, O. Mishima, M. Fujisawa, and T. Hattori, Phys. Rev. B 40, 12028 (1989).
24. M. P. Surh, S. G. Louie, and M. L. Cohen, Phys. Rev. B 43, 9126 (1991).
25. K. Okumura, J. Mort, and M. Mchonkin, Appl. Phys. Lett. 57, 1907 (1990).
26. R. A. Roberts and W. C. Walker, Phys. Rev. 161, 730 (1967).
27. F. J. Himpsel, J. A. Knapp, J. A. VanVechten, and D. E. Eastman, Phys. Rev. B 20, 624 (1979).
28. I. Fleming, Frontier Orbitals and Organic Chemical Reactions (Wiley, New York, 1976).
29. R. G. Pearson, J. Am. Chem. Soc. 85, 3533 (1963).
30. R. G. Pearson and J. Songstad, J. Am. Chem. Soc. 89, 1827 (1967).