Mechanism of the rf sputtering of mixed oxides

Technical Physics

Volumn 43, Issue 9, 1998, Pages 1097-1101

  Mukhortov, V M ^a   Tolmachev, G N ^a   Golovko, Yu I ^a   Mashchenko, A I ^a  

^a PROKHOROV GENERAL PHYSICS INSTITUTE   (Russian Federation)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0032342840     PISSN: 10637842     EISSN: None     Source Type: Journal    
DOI: 10.1134/1.1259140     Document Type: Article

References (7)

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3. V. M. Mukhortov, Yu. I. Golovko, V. A. Aleshin et al., Phys. Status Solidi A 78, 253 (1983).
4. O. V. Kozlov, Electric Probe in a Plasma [in Russian], Atomizdat, Moscow (1969), 291 pp.
5. V. Ya. Khasilev, V. S. Mikhalevskiǐ, and G. N. Tolmachev, Fiz. Plazmy 6, 430 (1980) [Sov. J. Plasma Phys. 6, 236 (1980)].
6. E. W. McDaniel, Collision Phenomena in Ionized Gases [Wiley, New York, 1964; Mir, Moscow, 1967, 162 pp.].
7. T. Katayama, N. Koshizuka, T. Kitaguchi et al., IEEE Transl. J. Magn. Jpn. 4, 244 (1989).