Simple method for the control of substrate ion fluxes using an unbalanced magnetron

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 16, Issue 1, 1998, Pages 145-147

  Telling, N D ^a   Petty, M ^a   Crapper, M D ^a  

^a LOUGHBOROUGH UNIVERSITY   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0032342472     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.580962     Document Type: Article

References (7)

1. S. P. Vernon, D. G. Steams, and R. S. Rosen, Appl. Opt. 32, 6969 (1993).
2. I. Petrov, F. Adibi, J. E. Greene, L. Hultman, and J.-E. Sundgren, Appl. Phys. Lett. 63, 36 (1993).
3. C.-H. Choi, R. Ai, and S. A. Barnett, J. Electron. Mater. 20, 379 (1991).
4. I. Petrov, F. Adibi, J. E. Greene, W. D. Sproul, and W. D. Munz, J. Vac. Sci. Technol. A 10, 3283 (1992).
5. B. Window and G. L. Harding, J. Vac. Sci. Technol. A 8, 1277 (1990).
6. A. Belkind and Z. Orban, J. Vac. Sci. Technol. A 11, 642 (1993).
7. W. D. Sproul, Surf. Coat. Technol. 49, 284 (1991).