Optical functions of silicon at high temperatures

Journal of Applied Physics

Volumn 84, Issue 11, 1998, Pages 6291-6298

  Sik J ^a   Hora, J ^a   Humlicek J ^a  

^a MASARYK UNIVERSITY   (Czech Republic)

Author keywords

[No Author keywords available]

Indexed keywords

CARRIER CONCENTRATION; DIELECTRIC PROPERTIES; ELLIPSOMETRY; HIGH TEMPERATURE EFFECTS; LIGHT ABSORPTION; OPTICAL VARIABLES MEASUREMENT; PHOTONS; REFRACTIVE INDEX; SEMICONDUCTOR DOPING; SPURIOUS SIGNAL NOISE; ULTRAVIOLET RADIATION;

ANGLE OF INCIDENCE; DIELECTRIC FUNCTIONS; INTERBAND TRANSITION; LORENTZIAN BROADENING; NUMERICAL CONVOLUTION; PHOTON ENERGY; ULTRAVIOLET SPECTRAL REGIONS;

SEMICONDUCTING SILICON;

EID: 0032336467     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.368951     Document Type: Article

References (13)

1. D. E. Aspnes and A. A. Studna, Phys. Rev. B 27, 985 (1983).
2. G. Vuye, S. Fisson, V. Nguyen Van, Y. Wang, J. Rivory, and F. Abeles, Thin Solid Films 233, 166 (1993).
3. P. Lautenschlager, M. Garriga, L. Viña, and M. Cardona, Phys. Rev. B 36, 4821 (1987).
4. G. E. Jellison, Jr. and F. A. Modine, Phys. Rev. B 27, 7466 (1983).
5. Y. J. van der Meulen and N. C. Hien, J. Opt. Soc. Am. 64, 804 (1974).
6. G. E. Jellison, Jr. and F. A. Modine, J. Appl. Phys. 76, 3758 (1994).
7. M. Cardona, in Modulation Spectroscopy, Suppl. 11 of Solid State Physics, edited by F. Scitz, D. Turnbull, and H. Ehrenreich (Academic, New York, 1969).
8. J. Humlíćek, F. Lukeš, E. Schmidt, M. G. Kekoua, and E. Khoutsishvili, Phys. Rev. B 33, 1092 (1986).
9. G. E. Jellison, Jr., S. P. Withrow, J. W. McCamy, J. D. Budai, D. Lubben, and M. J. Godbole, Phys. Rev. B 52, 14607 (1995).
10. J. Humlíćek, E. Schmidt, L. Bočánek, and R. Švehla, Phys. Rev. B 48, 5241 (1993).
11. J. Geist, in Handbook of Optical Constants of Solids III, edited by E. Palik (Academic, New York, 1998).
12. Y. P. Varshni, Physica (Utrecht) 34, 149 (1967).
13. H. W. Icenogle, B. C. Platt, and W. L. Wolfe, Appl. Opt. 15, 2348 (1976).