Use of a new type of atomic hydrogen source for cleaning and hydrogenation of compound semiconductive materials

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 16, Issue 4, 1998, Pages 2556-2561

  Kagadei, V A ^a   Proskurovsky, D I ^b  

^a Research Institute of Semiconductor Devices   (Russian Federation)

^b INSTITUTE OF HIGH CURRENT ELECTRONICS   (Russian Federation)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0032335869     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.581381     Document Type: Article

References (19)

1. S. R. Leone, Jpn. J. Appl. Phys., Part 1 34, 2073 (1995).
2. E. J. Murphy and J. H. Brophy, Rev. Sci. Instrum. 50, 635 (1979).
3. A. Rousseau, L. Tomasini, G. Gousset, C. Boisse-Laporte, and P. Leprince, J. Phys. D 27, 2439 (1994).
4. N. Watanabe, T. Nittono, H. Ito, N. Kondo, and Y. Nanishi, J. Appl. Phys. 73, 8146 (1993).
5. P. O'Keefee, S. Komuro, S. Den, T. Morikawa, and Y. Aoyagi, Jpn. J. Appl. Phys., Part 1 30, 3164 (1991).
6. T. Sagaya and M. Kawabe, Jpn. J. Appl. Phys., Part 2 30, L402 (1991).
7. A. Callegari, P. D. Hoh, D. A. Buchanan, and D. Lacey, Appl. Phys. Lett. 54, 332 (1989).
8. A. Paccagnella, A. Callegari, E. Latta, and M. Gasser, Appl. Phys. Lett. 55, 259 (1989).
9. V. A. Kagadei, D. I. Proskurovsky, and O. E. Troyan, Russian Patent No. 2088056.
10. Plasma - Emitter Sources of Charged Particles, edited by P. M. Shchanin (Nauka, Ekaterenburg, 1993).
11. A. Sherman, J. Vac. Sci. Technol. B 8, 656 (1990).
12. L. M. Weegels, T. Saitoh, and H. Kanbe, J. Appl. Phys. 77, 5987 (1995).
13. Problems of Physical Chemistry for Semiconductor Surfaces, edited by A. V. Rzhanov (Nauka, Novosibirsk, 1978).
14. Problems of Physics and Chemistry for Semiconductor Surfaces, edited by A. V. Rzhanov (Nauka, Novosibirsk, 1972).
15. S. J. Pearton, J. W. Corbett, and M. J. Stavola, Hydrogen in Crystalline Semiconductors (Springer, Berlin, 1992).
16. J. Chevallier and M. Aucouturier, Annu. Rev. Mater. Sci. 18, 219 (1988).
17. A. Jalil, A. Heurtel, Y. Marfaing, and J. Chevallier, J. Appl. Phys. 66, 5854 (1989).
18. V. G. Bozhkov, V. A. Kagadei, and N. A. Torkhov, Izv. Vyssh. Uchebn. Zaved. Fiz. (to be published).
19. V. G. Bozhkov, V. A. Kagadei, and N. A. Torkhov, Fiz. Tekh. Poluprovodn. (to be published).