Deformation mechanisms in thin Cu films

Materials Research Society Symposium - Proceedings

Volumn 516, Issue , 1998, Pages 287-298

  Baker, Shefford P ^a   Keller, Rose Marie ^a   Kretschmann, Andre ^a   Arzt, Eduard ^a  

^a UNIVERSITY OF STUTTGART   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

COPPER; CREEP; CRYSTAL MICROSTRUCTURE; DEFORMATION; DISLOCATIONS (CRYSTALS); METALLIC FILMS; PASSIVATION; SILICON; SILICON NITRIDE; STRESS ANALYSIS; THIN FILMS; X RAY CRYSTALLOGRAPHY;

STRESS LEVELS;

SEMICONDUCTING FILMS;

EID: 0032321078     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1557/proc-516-287     Document Type: Conference Paper

References (16)