Mechanical properties of Cu/Ta multilayers prepared by magnetron sputtering

Materials Research Society Symposium - Proceedings

Volumn 522, Issue , 1998, Pages 269-274

  Nguyen, Tai D ^a   Barbee Jr , Troy W ^a  

^a LAWRENCE LIVERMORE NATIONAL LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS FILMS; ANNEALING; COPPER; CRYSTAL MICROSTRUCTURE; CRYSTALLINE MATERIALS; MAGNETRON SPUTTERING; MICROHARDNESS; RESIDUAL STRESSES; TANTALUM; THERMAL EFFECTS; TRANSMISSION ELECTRON MICROSCOPY; X RAY CRYSTALLOGRAPHY;

METASTABLE TETRAGONAL STRUCTURE;

MULTILAYERS;

EID: 0032320258     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (16)