Nanotribological improvements due to surface chemistry modification

Materials Research Society Symposium - Proceedings

Volumn 522, Issue , 1998, Pages 481-486

  Scherge, M ^a   Li, X ^a   Schaefer, J A ^a  

^a ILMENAU UNIVERSITY OF TECHNOLOGY   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ADHESION; ADSORPTION; ETCHING; FORCE MEASUREMENT; FRICTION; HYDROFLUORIC ACID; HYDROPHOBICITY; SURFACE CHEMISTRY; SURFACE TOPOGRAPHY; SURFACE TREATMENT; TRIBOLOGY; WATER;

NANOTRIBOLOGY;

SEMICONDUCTING SILICON;

EID: 0032319614     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (13)