Comprehensive physical model of oxide wearout and breakdown involving trap generation, charging, and discharging

International Integrated Reliability Workshop Final Report

Volumn , Issue , 1998, Pages 55-61

  Qian, D ^a   Dumin, D J ^a  

^a CLEMSON UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL BONDS; ELECTRIC BREAKDOWN OF SOLIDS; ELECTRIC POTENTIAL; MATHEMATICAL MODELS; OXIDES; RELIABILITY; STRESSES; WEAR OF MATERIALS;

EYRING EQUATION; TRAP GENERATION;

INTEGRATED CIRCUIT MANUFACTURE;

EID: 0032318540     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (25)