PZT capacitors using IrO2 electrode by RF magnetron sputtering

Integrated Ferroelectrics

Volumn 21, Issue 1-4, 1998, Pages 511-519

  Hong, Kwon ^a   You, In Kyu ^a   Yu, Yong Sik ^a   Lee, Sahang Kyoo ^a  

^a Hynix Semiconductor Inc   (South Korea)

Author keywords

Fatigue; Leakage current density; Perovskite; Pt IrO2 hybrid; PZT

Indexed keywords

ANNEALING; CURRENT DENSITY; DIELECTRIC FILMS; FATIGUE TESTING; IRIDIUM COMPOUNDS; LEAD COMPOUNDS; LEAKAGE CURRENTS; MAGNETRON SPUTTERING; PEROVSKITE; SPUTTER DEPOSITION; SUBSTRATES; THERMAL EFFECTS;

FERROELECTRIC THIN FILMS;

CAPACITORS;

EID: 0032318523     PISSN: 10584587     EISSN: None     Source Type: Journal    
DOI: 10.1080/10584589808202091     Document Type: Article

References (8)

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