Hardness of thin films determined based on nanoindentation load and contact stiffness

Materials Research Society Symposium - Proceedings

Volumn 522, Issue , 1998, Pages 257-262

  Stone, D S ^a   Tambwe, M F ^a   Kung, H ^a   Nastasi, M ^a  

^a UNIVERSITY OF WISCONSIN MADISON   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

COPPER; HARDNESS; MATHEMATICAL MODELS; MECHANICAL VARIABLES MEASUREMENT; MULTILAYERS; NIOBIUM; STIFFNESS; THIN FILMS;

NANOINDENTATION;

METALLIC FILMS;

EID: 0032318068     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (13)