Electrical properties of sandwich structures with aluminum nitride layers

Proceedings of the International Semiconductor Conference, CAS

Volumn 1, Issue , 1998, Pages 221-224

  Tanase, Mihaela ^a   Morosanu, C ^a   Dumitru, V ^a   Tugulea, Laura ^a   Tomozeiu, N ^a  

^a NATIONAL INSTITUTE OF MATERIALS PHYSICS   (Romania)

Author keywords

[No Author keywords available]

Indexed keywords

ACTIVATION ENERGY; ANNEALING; ELECTRIC PROPERTIES; FILM PREPARATION; INTERFACES (MATERIALS); MAGNETRON SPUTTERING; SANDWICH STRUCTURES; SEMICONDUCTING ALUMINUM COMPOUNDS; THERMAL EFFECTS;

ALUMINUM NITRIDE; ARRHENIUS PLOTS; TRANSIENT CURRENT CURVES;

SEMICONDUCTING FILMS;

EID: 0032317736     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (4)