Quartz channel fabrication for electrokinetically driven separations

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3515, Issue , 1998, Pages 164-171

  Matzke, C M ^a   Arnold, D W ^a   Ashby, C I H ^a   Kravitz, S H ^a   Warren, M E ^a   Bailey, C G ^a  

^a SANDIA NATIONAL LABORATORIES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTALLINE MATERIALS; DEPOSITION; ETCHING; MEMBRANES; MICROOPTICS; SEPARATION;

MICROCHANNELS;

MICROMACHINING;

EID: 0032316578     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.322078     Document Type: Conference Paper

References (9)