Mass spectroscopy of recoiled ion investigation of electrode segregation effects during the initial stages of SrBi2Ta2O9 film growth

Integrated Ferroelectrics

Volumn 22, Issue 1-4, 1998, Pages 223-235

  Im, J ^a,b   Krauss, A R ^a   Auciello, O ^a   Gruen, D M ^a   Chang, R P H ^b  

^a ARGONNE NATIONAL LABORATORY   (United States)

^b Northwestern University   (United States)

Author keywords

Ferroelectric films; Pt Ti electrodes; SrBi2Ta2O9

Indexed keywords

COMPOSITION EFFECTS; ELECTRODES; FERROELECTRIC MATERIALS; FILM GROWTH; MASS SPECTROMETRY; PLATINUM; SPUTTER DEPOSITION; STRONTIUM COMPOUNDS; SUBSTRATES; SURFACE STRUCTURE; THERMODYNAMIC STABILITY;

MASS SPECTROSCOPY OF RECOILED IONS (MSRI); STRONTIUM BISMUTH TANTALATE;

DIELECTRIC FILMS;

EID: 0032316438     PISSN: 10584587     EISSN: None     Source Type: Journal    
DOI: 10.1080/10584589808208044     Document Type: Article

References (15)

1. C.A. Paz de Araujo, J.D. Cuchiaro, L.D. McMillan, M.C. Scott, and J.F. Scott, Nature, 374, 627 (1995).
2. O. Auciello, A.R. Krauss, and K.D. Guifford, in Ferroelectric Thin Films: Fundamentals and Technology, edited by C.A.Paz de Araujo, J.F.Scott, and G.W.Taylor (Gordon and Breach, New York, 1997), p. 393.
3. O. Auciello, Integrated Ferroelectrics, 15, 211 (1997).
4. K. Sreenivas, I. Reaney, T. Maeder, N. Setter, C. Jagadish, and R.G. Elliman, J. Appl. Phys. 75, 232 (1994).
5. R. Bruchhaus, D. Pitzer, O. Eibl, U. Scheithauer, and W. Hoesler, Mat. Res. Soc. Symp. Proc., 243, 123 (1992).
6. G. Schindler, W. Hartner, V. Joshi, N. Solayappan, G. Derbenwick and C. Mazure, Integrated Ferroelectrics, 17, 421 (1997).
7. A.R. Krauss, O. Auciello and J.A. Schultz, MRS Bulletin, 20, 18 (1995).
8. K. Waters, A. Bensaoula, J.A. Schultz, K. Eipers-Smith, and A. Freundlich, J. Crystal Growth, 127, 972 (1993).
9. J. Im, A.R. Krauss, Y. Lin, J.A. Schultz, O. Auciello, D.M. Gruen and R.P.H. Chang, Nucl. Instrum. Meth., B 118, 772 (1996).
10. O. Auciello, A.R. Krauss, and J. Im, in Ferroelectric Thin Films, Ch. 4, edited by R. Ramesh (Kluwer Academic Publisher, The Netherlands, 1997), p. 91.
11. O. Auciello, A.R. Krauss, J. Im and J.A. Schultz, in Annu. Rev. Mater. Sci., edited by O. Auciello, C.M. Foster, and R. Ramesh, 28, 375 (1998).
12. A.R. Krauss, Y. Lin, O. Auciello, G.J. Lamich, D.M. Gruen, J.A. Schultz, and R.P.H. Chang, J. Vac. Sci. Technol. A 12, 1943 (1994).
13. J. T. Evans Jr., L.L. Boyer and N B. Velasquez, presented at the 9th International Meeting on Ferroelectricity, Seoul, Korea, 1997.
14. J. Im, O. Auciello, A.R. Krauss, A. Dhote, D.M. Gruen, R.Ramesh and R.P.H. Chang, Appl. Phys. Lett., 72, 2529 (1998).
15. Y. Lin, A.R. Krauss, O. Auciello, Y. Nishino, D.M. Gruen, J.A. Schultz, and R.P.H. Chang, J. Vac. Sci. Technol. A 12, 1557 (1994).