Pulsed femtosecond excimer laser-induced chemically clean etching of diamond

Materials Research Society Symposium - Proceedings

Volumn 526, Issue , 1998, Pages 123-129

  Malshe, A P ^a   Ozkan, A M ^a   Railkar, T A ^a   Molian, P A ^a   Brown, W D ^a  

^a UNIVERSITY OF ARKANSAS   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ETCHING; EXCIMER LASERS; LASER BEAM EFFECTS; MICROSTRUCTURE; PULSED LASER APPLICATIONS; RAMAN SPECTROSCOPY; THERMODYNAMIC STABILITY; ULTRAFAST PHENOMENA;

CHEMICAL ETCHING;

DIAMONDS;

EID: 0032315969     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1557/proc-526-123     Document Type: Conference Paper

References (23)