Etching and exfoliation techniques for the fabrication of 3-D meso-scales structures on LTCC tapes

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3582, Issue , 1998, Pages 121-126

  Park, Jaiyung ^a   Espinoza Vallejos, Patricio ^a   Sola Laguna, Luis ^a   Santiago Aviles, Jorge ^a  

^a UNIVERSITY OF PENNSYLVANIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ANISOTROPY; CERAMIC MATERIALS; ETCHING; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; SEMICONDUCTING FILMS; SEMICONDUCTOR DEVICE MANUFACTURE; SEMICONDUCTOR DEVICE STRUCTURES;

CHEMICAL MACHINING; LOW TEMPERATURE CO-FIRED CERAMICS (LTCC) TAPES;

ELECTRONICS PACKAGING;

EID: 0032315863     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (4)