Structural investigations of laser-crystallized hydrogenated amorphous silicon

Materials Research Society Symposium - Proceedings

Volumn 508, Issue , 1998, Pages 97-102

  Toet, D ^a   Smith, P M ^a   Sigmon, T W ^a   Qiu, R ^a   Takehara, T ^a   Sun, S ^a   Tsai, C C ^a   Harshbarger, W R ^a  

^a LAWRENCE LIVERMORE NATIONAL LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; CRYSTAL STRUCTURE; CRYSTALLIZATION; EXCIMER LASERS; FILM PREPARATION; LASER PULSES; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; SURFACE ROUGHNESS; THIN FILM TRANSISTORS; TRANSMISSION ELECTRON MICROSCOPY;

LASER CRYSTALLIZATION;

AMORPHOUS SILICON;

EID: 0032315602     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1557/proc-508-97     Document Type: Conference Paper

References (11)