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Volumn , Issue , 1998, Pages 72-73
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Sub-50-nm PtSi Schottky source/drain p-MOSFETs
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Author keywords
[No Author keywords available]
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Indexed keywords
CMOS INTEGRATED CIRCUITS;
CURRENT VOLTAGE CHARACTERISTICS;
GATES (TRANSISTOR);
OXIDES;
PLATINUM COMPOUNDS;
SEMICONDUCTING SILICON;
SEMICONDUCTOR DEVICE MANUFACTURE;
SEMICONDUCTOR DEVICE STRUCTURES;
SEMICONDUCTOR DOPING;
SEMICONDUCTOR JUNCTIONS;
SUBSTRATES;
THERMIONIC EMISSION;
DRAIN;
SCHOTTKY BARRIER;
SOURCE;
MOSFET DEVICES;
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EID: 0032314906
PISSN: None
EISSN: None
Source Type: Conference Proceeding
DOI: None Document Type: Conference Paper |
Times cited : (12)
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References (4)
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