Sputter deposition of high resistivity boron carbide

Thin Solid Films

Volumn 335, Issue 1-2, 1998, Pages 174-177

  Ahmad, Ahmad A ^a   Ianno, N J ^a   Hwang, Seong Don ^a   Dowben, P A ^a  

^a UNIVERSITY OF NEBRASKA LINCOLN   (United States)

Author keywords

Boron carbide; Deposition process; Sputtering

Indexed keywords

COMPOSITION EFFECTS; MAGNETRON SPUTTERING; METHANE; SPUTTER DEPOSITION;

HIGH RESISTIVITY BORON CARBIDE;

BORON CARBIDE;

EID: 0032314896     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(98)00876-1     Document Type: Article

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