Tip surface silicidation to improve emission behavior of field emitter arrays

Proceedings of the IEEE International Vacuum Microelectronics Conference, IVMC

Volumn , Issue , 1998, Pages 304-305

  Lee, Jong Duk ^a   Uh, Hyung Soo ^a   Shim, Byung Chang ^a   Cho, Euo Sik ^a   Oh, Chang Woo ^a   Kwon, Sang Jik ^a  

^a Seoul National University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

BINDING ENERGY; COBALT ALLOYS; DEPOSITION; ELECTRON EMISSION; MOLYBDENUM ALLOYS; NITROGEN; RAPID THERMAL ANNEALING; SEMICONDUCTING SILICON COMPOUNDS; TITANIUM ALLOYS; X RAY DIFFRACTION ANALYSIS; X RAY PHOTOELECTRON SPECTROSCOPY;

COBALT SILICIDE; MOLYBDENUM SILICIDE; SILICIDATION; TITANIUM SILICIDE;

FIELD EMISSION CATHODES;

EID: 0032314210     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (4)