Diamond synthesis on silicon nitride by the hot filament chemical vapor deposition technique

Journal of the Ceramic Society of Japan

Volumn 106, Issue 12, 1998, Pages 1167-1171

  Polini, Riccardo ^a   Mattei, Giorgio ^b   Marucci, Alessandra ^b   Traversa, Enrico ^a  

^a UNIVERSITY OF ROME TOR VERGATA   (Italy)

^b Ist Metodologie Avanzate I   (Italy)

Author keywords

Chemical vapor deposition; Diamond; EDS; Film growth; Heterogeneous nucleation; Roman spectroscopy; SEM; Silicon nitride

Indexed keywords

CHEMICAL VAPOR DEPOSITION; CRYSTAL ORIENTATION; DIAMOND FILMS; FILM GROWTH; HYDROGEN; METHANE; NUCLEATION; RAMAN SPECTROSCOPY; RESIDUAL STRESSES; SYNTHESIS (CHEMICAL); TEXTURES; THERMAL EFFECTS;

HOT FILAMENT CHEMICAL VAPOR DEPOSITION;

SILICON NITRIDE;

EID: 0032313653     PISSN: 09145400     EISSN: None     Source Type: Journal    
DOI: 10.2109/jcersj.106.1167     Document Type: Article

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