Study on fabrication of high aspect ratio electrostatic micro actuators using LIGA process

Proceedings of the International Symposium on Micromechatronics and Human Science

Volumn , Issue , 1998, Pages 155-160

  Kondo, Ryoji ^a   Suzuki, Kenichiro ^a   Sugiyama, Susumu ^a  

^a RITSUMEIKAN UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ASPECT RATIO; ELECTRODES; ELECTROSTATIC DEVICES; ETCHING; LITHOGRAPHY; MASKS; MICROSTRUCTURE; NICKEL; POLYMETHYL METHACRYLATES; SILICA; SURFACE ROUGHNESS;

LITHOGRAPHIE, GALVANOFORMUNG, ABFORMUNG (LIGA) PROCESS;

MICROACTUATORS;

EID: 0032313198     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (9)