Two-dimensional acoustic micromanipulation using three ultrasonic transducers

Proceedings of the International Symposium on Micromechatronics and Human Science

Volumn , Issue , 1998, Pages 201-204

  Kozuka, Teruyuki ^a   Tuziuti, Toru ^a   Mitome, Hideto ^a   Fukuda, Toshio ^a   Arai, Fumihito ^a  

^a NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

MECHATRONICS; MICROMACHINING; POSITION CONTROL; ULTRASONIC TRANSDUCERS;

ACOUSTIC RADIATION PRESSURE; MICROMANIPULATION; TWO-DIMENSIONAL ACOUSTIC MANIPULATION;

MICROELECTROMECHANICAL DEVICES;

EID: 0032313197     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (5)