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Volumn 19, Issue 4, 1998, Pages 579-588

CVD-SiC manufacturing process reproducibility

Author keywords

[No Author keywords available]

Indexed keywords

BENDING STRENGTH; CHEMICAL VAPOR DEPOSITION; CRYSTAL MICROSTRUCTURE; ELECTRIC CONDUCTIVITY OF SOLIDS; FRACTURE TOUGHNESS; GRAIN SIZE AND SHAPE; HARDNESS; SILICON CARBIDE; THERMAL CONDUCTIVITY OF SOLIDS; THERMAL EXPANSION; WEIBULL DISTRIBUTION;

EID: 0032312564     PISSN: 01966219     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Article
Times cited : (9)

References (22)
  • Reference 정보가 존재하지 않습니다.

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.