Dielectric property of sol-gel SiO2 thin film

Proceedings of the International Symposium on Electrical Insulating Materials

Volumn , Issue , 1998, Pages 43-46

  Shoubin, Zhang ^a   Xinsheng, Wang ^a   Yoshimura, Noboru ^a  

^a AKITA UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; DIELECTRIC PROPERTIES OF SOLIDS; HYDROCHLORIC ACID; SILICA; SOL-GELS; THIN FILMS;

DIELECTRIC DISPERSION;

DIELECTRIC FILMS;

EID: 0032312327     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (8)